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Rotating joint for semiconductor ECD equipment
characteristic
1) The electric slip ring and liquid slip ring are integrated into one, with a small volume;
2) IP54 protection level;
3) Speed up to 1000rpm;
4) Low torque
Technical parameters
| rotary electrical joint | Pressure (kPa) | 250 |
| Rotational speed (rpm) | 1000 | |
| Fluid diameter(mm) | 3.2 | |
| number of channels | 2 | |
| slip ring | ||
| Protection level | IP54 | |
| Maximum current (A) | 30 | |
| Rated voltage (V) | 400V(AC/DC) |
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